ТРИС (МЕТИЛЦИКЛОПЕНТАДИЕНИЛ) ИТТРИЙ (III)

What is this

Tris(methylcyclopentadienyl)yttrium(III), abbreviated as Y(MeCp)₃, is an organometallic complex of yttrium in the +3 oxidation state with three methylcyclopentadienyl ligands bound in the η⁵-type. The main purpose is as a precursor for atomic layer deposition (ALD) and gas-phase deposition (MOCVD). Thin films of yttrium oxide Y₂O₃ and yttrium-stabilized zirconium oxide are grown on it. Among the yttrium compounds studied, this complex has the highest vapor pressure, which is critical for an acceptable film growth rate in the MOCVD process. When combined with water as an oxygen source, the precursor produces Y₂O₃ layers with a reduced content of carbon and hydrogen impurities and better electrical characteristics compared to alternatives. Trademarks - 97% and 99.9%, yttrium purity 99.9% (REO).

Identification

• CAS No: 329735-72-0
• Chemical formula according to the product card: C18H9Y
• Formula according to literature data: C18H21Y - the exact mass given below is consistent with it
• Synonyms: tris(methylcyclopentadienyl)yttrium, Y(MeCp)₃, 3CpY, tris[(1,2,3,4,5-delta)-1-methyl-2,4-cyclopentadien-1-yl]yttrium
• Product specifications: 97% (99.9%-Y) (REO); 99.9%

Basic Attributes

• Molecular weight according to the product card: 314.18
• Exact weight: 326.070164
• Molecular weight according to literature data: 326.27

The value of 314.18 from the product card differs from the exact mass of 326.070164 and from the literary value of 326.27; when calculating weights, they are based on 326.27.

Physico-chemical properties

• Appearance: yellow crystalline organometallic compound
• Solubility in water: insoluble

Scope of application

• ALD and CVD precursor for deposition of yttria Y₂O₃ films
• deposition of layers of zirconium dioxide stabilized with yttria
• production of yttrium-containing oxides for electronics, high-power lasers and optical waveguide materials
• protective and barrier coatings based on yttrium oxide
• parent compound in the chemistry of yttrium organic complexes

Handling and storage

Cyclopentadienyl complexes of rare earth metals are sensitive to moisture and oxygen. All operations are carried out under inert gas - in a glove box or on a Schlenk line, with anhydrous degassed solvents. The container is opened only in an inert environment.

Safety Information

• Packing level: III
• Hazard category: in the product card the line is given without meaning

There are no GHS classifications, H- and P-phrases in the original product data sheet, therefore specific hazard instructions are not provided.